Nanotechnology Lithography Cleanroom
Design/Build Turnkey Nanotechnology Lithography Cleanroom
Modular Cleanroom Implementation Details
Modular Cleanroom Information:
Client: Auburn University
Location: Auburn, Alabama
Industry: University/College Cleanrooms
Cleanroom Type: Nanotechnology Lithography Cleanroom
Size: 5 cleanrooms totaling 6000 sq. ft.
Designed By: Precision Cleanrooms
Installed By: Precision Cleanrooms
Cleanliness Class: Cleanroom Class 10 – Cleanroom Class 10000
Project Highlights:
- Designed as a SCIF
- Raised floor
- Non-outgassing semiconductor wall system
- Temperature humidity control
- Cleanroom mechanical design and installation
- Cleanroom electrical design and installation
- Cleanroom control system design and installation
- Cleanroom testing and certification
- High purity process piping
- N2 generator
- DI water system
- Air pollution control system
- Supply and install process equipment
- Hazardous gas detection system